LTS -80℃～80℃ Fluoride cooling heating system

Temperature control during semiconductor manufacturing

Sistemas dinâmicos de controlo da temperatura Sistema de controlo da temperatura de líquidos fluorados Refrigeradores de teste de semicondutores

Controlo do fluxo12L/min~45L/min
Precisão da temperatura±0.1℃ @-60℃~-30℃
Internal circulating liquid4L~10L
Depósito de expansão10L~20L
Local de origemChina

sistema de controlo dinâmico da temperatura Controlo da temperatura de líquidos fluorados Série LTS refrigerador de teste de semicondutores

INQUÉRITO

Descarregamento de dados do produto

manual.pdf

Product Parameters

Modelo	LTS-802	LTS-803	LTS-804	LTS-806	LTS-808
	LTS-802W	LTS-803W	LTS-804W	LTS-806W	LTS-808W
Gama de temperaturas	-80℃～-20℃
Precisão do controlo da temperatura	±0.1℃ -80℃～-50℃
Controlo do fluxo	7～25L/min		12～45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	4L	5L	6L	8L	10L
Volume do depósito de expansão	10L	10L	15L	15L	20L
Indicação da pressão do sistema	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
Controlador	PLC Siemens, algoritmo de controlo PID difuso com algoritmo de controlo em cascata.
Temperature control	Modo de controlo da temperatura de saída do meio de transferência de calor
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Carta de acordo	Interface Ethernet Protocolo TCP/IP
	Interface RS485 protocolo modbus RTU
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
Sistema de circulação fechado	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
Compressor	Emerson Copeland/Danfoss Scroll Flexible Compressor
Bomba de circulação	German brand magnetic circulation pump
Evaporador	Adopt Danfoss/Gaoli plate heat exchanger
Condensador	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
Acessórios de refrigeração	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
Painel de controlo	Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
Segurança	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
Tamanho da interface de entrada e saída	G1/2	G1/2	G3/4	G3/4	G3/4

Descrição do produto

It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
Otimizar a amostragem da temperatura e a velocidade de resposta, algoritmo de controlo especialmente concebido, pode responder rapidamente a um controlo estável da temperatura.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.

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