LNEYA Refrigeradores industriais Fabricante Fornecedor
ALL Semiconductor chillers model
Refrigerador Peltier
TEC -20℃~90℃
TEMPERATURE ACCURACY ±0.1℃
Provide reliable and precise temperature control for wafer etching process
Temperatura do ponto de orvalho
≤30℃
≤30℃
Power supply voltage
AC208V-DC250V
three-phase voltage
AC208V-DC250V
three-phase voltage
CDA activation temperature
＜30℃
＜30℃
LNEYA Peltier chiller thermoelectric cooler temperature range from -20 to 90℃, tailor-made for the semiconductor industry;
Based on the proven Peltier heat conduction principle, the Peltier temperature control system can provide repeatable temperature control for plasma etching applications; dynamic temperature control of the electrostatic chuck (ESC) enables it to be applied to all types of etching processes.
TEC SERIES
-20°C
mais baixo
90°C
Mais alto
±0.1°C
Precisão do controlo da temperatura
| Modelo | TEC-1200W | TEC-2500W | TEC-4500W | |
| Temp. Gama | -20℃~90℃ | -20℃~90℃ | -20℃~90℃ | |
| Capacidade de arrefecimento | 20℃ | 1200w | 2450w | 4500w |
| 10℃ | 900w | 1925w | 3500w | |
| 0℃ | 600w | 1400w | 2600w | |
| -10℃ | 350w | 875w | 1600w | |
| -20℃ | 80w | 350w | 700w | |
| Potência de aquecimento | ＞3000w | ＞6000w | ＞12000w | |
| Pump type | DC magnetic pump | DC magnetic pump | DC magnetic pump | |
| Pressure（bar） | ≤4 | ≤4 | ≤4 | |
| Fluxo | 15L/min at 2bar | 15L/min at 2bar | 15L/min at 2bar | |
| Fluid | Galden HT135 | Galden HT135 | Galden HT135 | |
| Temperatura da água de arrefecimento | DI＜20℃ | DI＜20℃ | DI＜20℃ | |
| Cooling Water Flow | ≤12L/min | ≤20L/min | ≤32L/min | |
| Pressure | 0.5-0.8bar | 0.5-0.8bar | 0.5-0.8bar | |
| Fluxo | 2-3m³/h | 2-3m³/h | 2-3m³/h | |
Dynamic temperature control principle
1.Chuck wafer carrier
2.Circulation pump
3.Controller
4.Thermoelectric heat exchange module
5.Power module
6.Cooling water inlet
7.Cooling water outlet
This on-site temperature control solution significantly improves process uniformity between wafer batches and between chambers.
How it works: Real-time monitoring of the chamber’s reflow wave body temperature is used to dynamically adjust the supply temperature to compensate for changes in heat load during the process.
*On-site temperature control system
*Fast ramp rates significantly improve chamber throughput
*Compressor-free point-of-use system reduces energy consumption by approximately 50%
PELTIER CHILLER FEATURES
They operate completely without refrigerant and require very little maintenance.
Pode confiar na nossa fábrica de refrigeradores portáteis
Somos um fornecedor de chillers muito potente com a nossa própria fábrica e mais de 20 anos de experiência na área de controlo de temperatura
Serviço global
Atendeu mais de 30.000 clientes.
Exportado para mais de 20 países.
Patentes de certificação
Obteve a certificação CE, certificação SGS, certificação ISO.
Serviço pós-venda
Fornece treinamento técnico abrangente.
Com soluções 24/7.
Equipa profissional
Fundada em 2010, com 15 anos de experiência no setor.
20% of employees are technicians.
Controlo de qualidade
Visual inspection.
Performance test.
Electrical safety test.
FAQ
Peltier chiller fast and precise temperature control, able to meet any demanding process requirements
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