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LTS -20℃~80℃

LTS -20℃~80℃ Fluoride cooling and heating system

Temperature control during semiconductor manufacturing
  • Controlo do fluxo12L/min~45L/min
  • Internal circulating liquid4L~10L
  • Depósito de expansão10L~20L
  • Local de origemChina

Descarregamento de dados do produto

Parâmetros pormenorizados

ModeloLTS-202LTS-203LTS-204LTS-206LTS-208
LTS-202WLTS-203WLTS-204WLTS-206WLTS-208W
Gama de temperaturas -20℃~35℃
Precisão do controlo da temperatura±0.1℃  at  -20℃~0℃
Controlo do fluxo 7~25L/min12~45L/min
The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume4L5L6L8L10L
Volume do depósito de expansão10L10L15L15L20L
Indicação da pressão do sistemaThe pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
ControladorPLC, algoritmo de controlo PID difuso, com algoritmo de controlo em cascata
Temperature controlModo de controlo da temperatura de saída do meio de transferência de calor
External temperature sensor: (PT100 or 4~20mA or communication setting) control mode (cascade control)
Carta de acordoInterface Ethernet Protocolo TCP/IP
Interface RS485 protocolo modbus RTU
Internal temperature feedback of equipmentEquipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
Sistema de circulação fechadoThe whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
CompressorEmerson Copeland/Danfoss Scroll Flexible Compressor
Bomba de circulaçãoMagnetic circulation pump
EvaporadorPermutador de calor de placas
CondensadorMicro channel condenser (air-cooled)
Plate heat exchanger (water-cooled), special attention: clean factory water is required
Acessórios de refrigeraçãoDanfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
Painel de controloEcrã tátil a cores de 7 polegadas personalizado LNEYA, visualização da curva de temperatura\EXCEL exportação de dados
SegurançaWith self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
Tamanho da interface de entrada e saídaZG1/2ZG1/2ZG3/4ZG3/4ZG3/4

Descrição do produto

It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
Otimizar a amostragem da temperatura e a velocidade de resposta, algoritmo de controlo especialmente concebido, pode responder rapidamente a um controlo estável da temperatura.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.




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